ERG-400-SCI
- Channels: N/A
- Ampacity: N/A
- Speed: N/A
- Mounting: N/A
- Data/Signal: N/A
- Voltage: 600V
Semiconductor
Slip Rings for the Semiconductor Industry
Meridian Laboratory’s ROTOCON slip rings and rotary grounds are essential components in semiconductor manufacturing, providing reliable power, data transfer, and grounding for a variety of processes like ingot growing, chemical mechanical polishing (CMP), thin film deposition (PVD, CVD, ALD), RF sputtering, and more. Built to operate successfully in demanding environments, ROTOCON slip rings deliver consistent, lossless data transfer and grounding without ever needing maintenance. Their brushless, sealed design eliminates any dust and environmental contamination for clean and efficient operation. With the ability to handle high-speed, high-frequency, and high-power applications, ROTOCON slip rings and rotary grounds perform consistently and reliably, often surpassing hundreds of millions of revolutions. These solutions integrate power, signal, and communication in one assembly, positioning them as a top solution for the semiconductor industry’s most challenging applications.
Application & Uses
Common Applications & Uses for Slip Rings in Semiconductor Manufacturing
Lossless Data and Dependable Performance
ROTOCON slip rings are utilized within ingot growing equipment to provide motor power and encoder data to stationary monitoring equipment.
The ROTOCON Advantage
ROTOCON slip rings deliver lossless data in real-time from encoders and other critical sensors without any downtime or maintenance, maximizing runtime and productivity during the ingot growing process. ROTOCON slip rings can help ingot producers maximize ROI by minimizing the risk of failures and impurities, supporting better operational efficiency and more reliable results.
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Sealed Design and Real-Time Data Transfer
ROTOCON brushless slip rings are used in CMP processing to provide electrical power and Ethernet communication between the logic controller and the wafer polishing heads.
The ROTOCON Advantage
ROTOCON brushless slip rings offer seamless real-time communication without packet loss or bit errors, and are maintenance-free throughout their lifespan. They are sealed, durable, and deliver consistent performance with no change regardless of rotational direction.
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Consistent Signal Transfer
ROTOCON slip rings are used within all types of deposition-based semiconductor manufacturing processes, including Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), and Atomic Layer Deposition (ALD).
The ROTOCON Advantage
Our ROTOCON brushless slip rings transmit consistent electrical signals to monitor key factors like deposition rate and temperature, resulting in a more uniform coating across the entire wafer. They provide consistent power and signal to the turntable whether stationary or rotating, and their brushless design eliminates any carbon dust creation, maintaining a clean operating environment.
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Mid-to-High Frequency Ranges with Minimal Loss
RF (Radio Frequency) sputtering deposition requires specialized rotary grounds that operate at mid-to-high frequencies to effectively ground the circuit during the ion deposition process onto the base material.
The ROTOCON Advantage
ROTOCON rotary grounds can be specifically engineered to handle mid-to-high frequency ranges with little loss, guaranteeing reliable and consistent ground contact without the need for maintenance, adjustments, or replacements. Fully sealed and dust-free, they operate without generating any type of free particulate matter.
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Consistent, Arc-Free Ground Circuit
Rotary grounds are used in PCB material manufacturing to provide a grounding circuit for rollers that experience static build-up and require a safe discharge path.
The ROTOCON Advantage
ROTOCON rotary grounds provide a consistent and arc-free ground circuit to dissipate static energy. They are sealed to protect against harsh chemicals and are built to survive the challenging environments in which they operate.
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Critical Signal Data and Zero Downtime
ROTOCON slip rings and rotary grounds are used in high-frequency wafer processing equipment operating at 13.56MHz to ground the platen and provide signals during operation.
The ROTOCON Advantage
ROTOCON rotary grounds can be configured to operate at mid-to-high level frequencies, delivering a reliable ground circuit without the need for maintenance. ROTOCON multi-channel slip rings transmit critical signal data to ensure that wafer processing is as accurate and efficient as possible, with no downtime.
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Capabilities
Engineering Capabilities & Services
Projects
Slip Ring Solutions for the Semiconductors Industry
ERG-701-003
- Channels: N/A
- Ampacity: N/A
- Speed: N/A
- Mounting: N/A
- Data/Signal: N/A
- Voltage: 600V
ERG-800-11
- Channels: N/A
- Ampacity: N/A
- Speed: N/A
- Mounting: End of Shaft
- Data/Signal: N/A
- Voltage: N/A
MX-10-CAT5
- Channels: 10
- Ampacity: N/A
- Speed: N/A
- Mounting: End of Shaft
- Data/Signal: N/A
- Voltage: 600V
MX-2-ASM
- Channels: 2
- Ampacity: N/A
- Speed: N/A
- Mounting: End of Shaft
- Data/Signal: N/A
- Voltage: 600V
MX-2-TYPE-J
- Channels: 2
- Ampacity: N/A
- Speed: N/A
- Mounting: End of Shaft
- Data/Signal: N/A
- Voltage: 600V
MX-20
- Channels: 20
- Ampacity: N/A
- Speed: N/A
- Mounting: End of Shaft
- Data/Signal: N/A
- Voltage: 600V
MX-4-0419
- Channels: 4
- Ampacity: N/A
- Speed: N/A
- Mounting: End of Shaft
- Data/Signal: N/A
- Voltage: 600V
MX-8
- Channels: 8
- Ampacity: N/A
- Speed: N/A
- Mounting: End of Shaft
- Data/Signal: N/A
- Voltage: 600V
Explore More
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Resources
Helpful Information
Browse our collection of slip ring resources to find detailed information on each model, including mounting instructions, applications, FAQs, whitepapers, and more.